Which part of ear could be damageg by loud noise? inner ear? middle ear? eardrum?

Inner Ear: Loud noise damages the microscopic hair cells in the inner ear. This damage manifests itself as tinnitus. Only an extremely loud, concussive blast ( like a bomb exploding) can rupture an eardrum. I've noticed you are asking many, many questions on tinnitus and hearing loss. You really need to see an ear specialist to examine your ears and do a hearing test.